Induction Thermal Vacuum Deposition of Niobium-containing Coatings on Titanium
DOI:
https://doi.org/10.24160/1993-6982-2026-4-47-53Keywords:
induction thermal vacuum sputtering, ring-shaped target, niobium, induction thermal vacuum deposition, niobium-containing coatingAbstract
It has been determined that, as a result of induction thermal vacuum sputtering, a niobium target is sputtered at an operating current of 500…700 A, a current frequency of 44 kHz, and a chamber pressure from 1.0…1.1 to 1.5…1.6 mm Hg. Regularities in the changes in the niobium and oxygen content on the coating surface of titanium disk samples obtained by induction thermal vacuum sputtering (ITVS) have been revealed. Experimental studies have shown that an increase in the exposure time during ITVS of niobium has an effect on the modified layer thickness and on the microhardness of niobium-containing coatings. The maximum microhardness of the coatings equal to around 16…21 GPa corresponds to an operating current of 500…600 A with a high-temperature exposure of 300…600 s.
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Для цитирования: Фомина М.А., Кошуро В.А., Войко А.В., Захаревич А.М., Артюхов И.И., Фомин А.А. Индукционно-термическое вакуумное нанесение ниобий-содержащих покрытий на титан // Вестник МЭИ. 2026. № 4. С. 47—53. DOI: 10.24160/1993-6982-2026-4-47-53
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Работа выполнена при поддержке Российского научного фонда (грант № 25-29-00010), https://rscf.ru/project/25-29-00010/
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Конфликт интересов: авторы заявляют об отсутствии конфликта интересов
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1. Geetha M., Singh A.K., Asokamani R., Gogia A.K. Ti Based Biomaterials, the Ultimate Choice for Orthopaedic Implants — a Review. Progress in Materials Sci. 2009;54(3):397—425.
2. Dsouki N.A. e. a. Cytotoxic, Hematologic and Histologic Effects of Niobium Pentoxide in Swiss Mice. J. Materials Sci: Materials in Medicine. 2014;25(5):1301—1305.
3. Matsuno H. e. a. Biocompatibility and Osteogenesis of Refractory Metal Implants, Titanium, Hafnium, Niobium, Tantalum and Rhenium. Biomaterials. 2001;22(11):1253—1262.
4. Karlinsey R.L., Hara A.T., Yi K., Duhn C.W. Bioactivity of Novel Self-assembled Crystalline Nb2O5 Microstructures in Simulated and Human Salivas. Biomedical Materials. 2006;1(1):16—23.
5. Wang X.J. e. a. In Vitro Bioactivity Evaluation of Titanium and Niobium Metals with Different Surface Morphologies. Acta Biomaterialia. 2008;4(5):1530—1535.
6. Olsson M., Akujärvi V., Ståhl J.-E., Bushlya V. Cryogenic and Hybrid Induction-assisted Machining Strategies as Alternatives for Conventional Machining of Refractory Tungsten and Niobium. Intern. J. Refractory Metals and Hard Materials. 2021;97:105520.
7. Xu Y.F. e. a. Effects of Cold Deformation on Microstructure, Texture Evolution and Mechanical Properties of Ti–Nb–Ta–Zr–Fe Alloy for Biomedical Applications. Materials Sci. and Eng.: A. 2012;547:64—71.
8. Chen L. e. a. Characterization of Plasma Electrolytic Oxidation Film on Biomedical High Niobium-containing β‑titanium Alloy. Surface and Coatings Technol. 2018;352:295—301.
9. Kaseem M., Choe H.-C. Electrochemical and Bioactive Characteristics of the Porous Surface Formed on Ti-xNb Alloys Via Plasma Electrolytic Oxidation. Surface and Coatings Technol. 2019;378:125027.
10. Jang S.-H., Choe H.-C., Ko Y.-M., Brantley W.A. Electrochemical Characteristics of Nanotubes Formed on Ti–Nb Alloys. Thin Solid Films. 2009;517(17):5038—5043.
11. Zhang Y. e. a. Microstructure and Mechanical Properties of Mo-Ta-W Refractory Multi-principal Element Alloy Thin Films for Hard Protective Coatings. Surface and Coatings Technol. 2022;431:128005.
12. Koshuro V., Fomina M., Zakharevich A., Fomin A. Superhard Ta–O–N Coatings Produced on Titanium Using Induction Physical Vapor Deposition. Ceramics Intern. 2022;48(13):19467—19483.
13. Koshuro V.A., Fomina M.A., Fomin A.A. Induktsionno-termicheskoe Vakuumnoe Raspylenie Kol'tsevyh Misheney iz Molibdena na Alyumooksidnye Podlozhki. Vestnik MEI. 2025;5:31—40. (in Russian)
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For citation: Fomina M.A., Koshuro V.A., Voyko A.V., Zakharevich A.M., Artyukhov I.I., Fomin A.A. Induction Thermal Vacuum Deposition of Niobium-containing Coatings on Titanium. Bulletin of MPEI. 2026;4:47—53. (in Russian). DOI: 10.24160/1993-6982-2026-4-47-53
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The Work was Carried Out Russian Science Foundation (Grant No. 25-29-00010), https://rscf.ru/project/25-29-00010/
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Conflict of interests: the authors declare no conflict of interest
